The center of all Entech cleaning systems is the 3100A Cleaner Module. The cleaner module includes the pumps sensors and computer control to automate the cleaning process through its SmartLab II™ Windows® interface.

The 3100A canister cleaning system delivers simplicity and effective quality control to the cleaning process. During cleaning, canister evacuation is performed in two stages. The first stage utilizes a diaphragm pump to perform a rough evacuation of the canisters. A molecular drag pump then further reduces the vacuum down to the millitorr range. Both pumps are oil free, eliminating the need for isolation traps. After evacuation, canisters are refilled with humidified zero air or nitrogen to dilute any remaining impurities. Cycling between fill and evacuation effectively eliminates all traces of VOC contaminants. Cleaning is performed by filling and evacuating with ultra pure nitrogen or zero air, followed by a final evacuation to 50 mtorr. Auto leak checking is supported.